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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ASM IP HOLDING B V	VERSTERKERSTRAAT 8 ALMERE 1322 AP

International Classification(s)

• C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Demos, Alexandros	Scottsdale, US	37	2300
Deye, Gregory	Phoenix, US	10	270
M'Saad, Hichem	Paradise Valley, US	125	14393
Miskin, Caleb	Mesa, US	30	262
Reiter, Steven	Phoenix, US	7	121
Wang, Fei	Phoenix, US	1116	10607

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Dec 22, 2026
7.5 Year Payment	$3600.00	$1800.00	$900.00	Dec 22, 2030
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Dec 22, 2034

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2023/0193,475

SYSTEMS AND METHODS FOR PROCESSING A SILICON SURFACE USING MULTIPLE RADICAL SPECIES

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