YTTRIUM INGOT AND SPUTTERING TARGET IN WHICH THE YTTRIUM INGOT IS USED

United States of America Patent

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Issued Date
Jul 6, 2023
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Apr 19, 2021
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Apr 23, 2020

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Abstract

Provided is an yttrium ingot from which an yttrium sputtering target that produces a reduced number of particles can be obtained, and an yttrium sputtering target that has high plasma resistance and a low resistance that enables realization of a high film deposition rate can be obtained.

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TOSOH CORPORATION	4560 KAISEI-CHO SHUNAN-SHI YAMAGUCHI 7468501 ?7468501

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Inventor Name	Address	# of filed Patents	Total Citations
HARA, Hiroyuki	Ayase-shi, JP	163	1426
MATSUNAGA, Osamu	Ayase-shi, JP	42	605
MESUDA, Masami	Ayase-shi, JP	25	19
TSUCHIDA, Yuya	Ayase-shi, JP	5	1

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YTTRIUM INGOT AND SPUTTERING TARGET IN WHICH THE YTTRIUM INGOT IS USED

Number of patents in Portfolio can not be more than 2000

United States of America Patent

17996718

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