ETCHING COMPOSITIONS

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United States of America Patent

APP PUB NO 20230243041A1
SERIAL NO

17587614

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An etching composition includes phosphate ions, pyrophosphate ions, polyphosphate ions, or a combination thereof and an oxidant. The etching composition has a neutral or basic pH.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATED12500 TI BOULEVARD MS 3999 DALLAS TX 75243

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
JACOBS, Simon Joshua Lucas, US 59 437

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