THIN-FILM STRUCTURE AND SEMICONDUCTOR DEVICE COMPRISING THE SAME
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United States of America Patent
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Sep 7, 2023
app pub date -
Aug 29, 2022
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Mar 7, 2022
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Abstract
A thin-film structure and a semiconductor device including the same are provided. The thin-film structure includes: a base layer; and a dielectric layer on the base layer, the dielectric layer including crystals including a <11x> (0≤x≤1) crystal orientation in an out-of-plane direction of the base layer and having an orthorhombic crystal structure of an oIV phase (space group: Pmn21).
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