COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR
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United States of America Patent
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Issued Date -
Oct 12, 2023
app pub date -
Mar 16, 2023
filing date -
Mar 31, 2022
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Abstract
A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.
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