Bath Systems and Methods Thereof
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United States of America Patent
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Issued Date -
Nov 9, 2023
app pub date -
Jul 12, 2023
filing date -
Jun 7, 2021
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Abstract
A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution.
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