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Abstract

Vibration sensors are provided. The vibration sensor may include: a vibration assembly, the vibration assembly including a mass element and an elastic element, and the mass element being connected to the elastic element; a first acoustic cavity, the elastic element constituting one of sidewalls of the first acoustic cavity, and the vibration assembly vibrating to make a volume of the first acoustic cavity change in response to an external vibration signal; an acoustic transducer, the acoustic transducer being in communication with the first acoustic cavity and the acoustic transducer generating an electrical signal in response to a volume change of the first acoustic cavity; and a buffer, the buffer limiting a vibration amplitude of the vibration assembly, wherein the acoustic transducer has a first resonance frequency, the vibration assembly has a second resonance frequency, and the second resonance frequency of the vibration assembly is smaller than the first resonance frequency.

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First Claim