Importance

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Abstract

A deburring unit removes burrs from a workpiece, the burrs being formed along kerfs cut by a cutting blade. The deburring unit includes a chuck table that holds the workpiece on a holding surface, an ultrasonic horn that emits ultrasonic waves from a lower surface, the lower surface facing an upper surface of the workpiece, a water film forming nozzle configured to form a water film such that the upper surface of the workpiece is covered in its entirety with the water film, and a controller. The controller is configured to cause the ultrasonic horn to come into contact at its lower surface with the water film formed by supply of water from the water film forming nozzle, such that ultrasonic vibrations propagate to the water film and remove the burrs formed in the kerfs of the workpiece.

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First Claim