METHOD OF IN SITU MODULATION OF STRUCTURAL MATERIAL PROPERTIES AND/OR TEMPLATE SHAPE
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United States of America Patent
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Issued Date -
Dec 21, 2023
app pub date -
Aug 18, 2023
filing date -
Sep 1, 2020
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Abstract
Probe structures, probe arrays, have varying intrinsic material properties along their lengths. Methods of forming probes and probe arrays comprise varying the plating parameters to provide varying intrinsic material properties. Some embodiments provide deposition templates created using multiphoton lithography to provide probes with varying lateral configurations along at least portion of their lengths.
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