METHOD AND APPARATUS FOR ATMOSPHERIC PRESSURE PLASMA JET COATING DEPOSITION ON A SUBSTRATE

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United States of America Patent

APP PUB NO 20230416921A1
SERIAL NO

18459809

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for plasma coating an object includes an object profile, having the steps of: a) manufacturing a replaceable shield comprising a jet inlet, a nozzle outlet and a sidewall extending from the jet inlet to the nozzle outlet, wherein the nozzle outlet includes an edge essentially congruent to at least part of the object profile; b) detachably attaching the replaceable shield to a jet outlet of a plasma jet generator, c) placing the object at the nozzle outlet such that the object profile fits closely to the nozzle outlet edge; d) plasma coating the object with a low-temperature, oxygen-free plasma at an operating pressure which is higher than the atmospheric pressure by providing a plasma jet in the shield via the plasma jet generator and injecting coating precursors in the plasma jet in the shield.

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Patent Owner(s)

Patent OwnerAddress
MOLECULAR PLASMA GROUP SA3895 FOETZ

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ALNASSER, Malek Foetz, LU 2 0
HEYBERGER, Regis Foetz, LU 3 0
SCHELTJENS, Gill Foetz, LU 13 1

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