X-Y STAGE YAW CORRECTION METHOD AND X-Y STAGE
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United States of America Patent
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Issued Date -
Jan 11, 2024
app pub date -
Dec 13, 2021
filing date -
Dec 14, 2020
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Abstract
The technology disclosed in the present disclosure is a method for correcting a yaw of an X-Y stage, including: moving an XY moving body in an X-axis or Y-axis direction using an actuator; measuring a yaw, which is a rotational displacement of the moved XY moving body, using a sensor; calculating, by a controller, a rotational stiffness value to be corrected, using the measured yaw data; and adding yaw correction flexures having a stiffness corresponding to the rotational stiffness value to be corrected to the X-Y stage.
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