ACOUSTIC RESONATOR AND FILTER DEVICE WITH BALANCED CHIRPING
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United States of America Patent
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Issued Date -
Jan 18, 2024
app pub date -
Jul 18, 2023
filing date -
Jul 18, 2022
priority date (Note) -
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Abstract
An acoustic resonator is provided that includes a substrate; a piezoelectric layer supported by the substrate; and an interdigital transducer (IDT) at a surface of the piezoelectric layer. The IDT includes a pair of busbars and a plurality of electrode fingers extending from the first and second busbars to be interleaved with each other. The respective widths of at least a portion of the electrode fingers increases in a direction from respective first ends of the first and second busbars to the respective second end of the first and second busbars. Moreover, a pitch of the portion of the electrode fingers decreases in the direction from the respective first ends of the first and second busbar to the respective second ends of the first and second busbars.
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