Inertial Measurement Device And Method For Manufacturing Inertial Measurement Device
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United States of America Patent
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Issued Date -
Feb 1, 2024
app pub date -
Jul 27, 2023
filing date -
Jul 28, 2022
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Abstract
An inertial measurement device includes: a substrate having a joining area; a cap; a sensor device accommodated in a resin package and disposed in a mounting area on the substrate in an internal space between the substrate and the cap; and a sealing material and a joining material configured to join the cap to the substrate in the joining area of the substrate. The joining material surrounds the mounting area and has a communication hole for communication between the internal space and the outside, and the sealing material closes the communication hole.
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