MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS
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United States of America Patent
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Issued Date -
Feb 8, 2024
app pub date -
Jun 28, 2020
filing date -
Jun 28, 2020
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Abstract
Provided is a manufacturing method for graphite slider arrays in batches. In this method, a grain structures examination step is added to a process of manufacturing graphite slider arrays, and a subsequent etching step is controlled so that only one horizontal grain boundary exists inside the graphite mesas, and when cleaved, the sliders slide away on the only grain boundary. The slider arrays prepared by this method have uniform easy-slip surfaces and thickness with good consistency.
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