SPUTTERING TARGET
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Issued Date -
Feb 8, 2024
app pub date -
Jun 26, 2020
filing date -
Jul 31, 2019
priority date (Note) -
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Abstract
The sputtering target of the present disclosure includes: an aluminum matrix; and (1) a material or phase containing aluminum and further containing either a rare earth element or a titanium group element or both a rare earth element and a titanium group element or (2) a material or phase containing either a rare earth element or a titanium group element or both a rare earth element and a titanium group element, at a content of 10 to 70 mol % in the aluminum matrix.
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