PROCESSING SYSTEM AND PROCESSING METHOD

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United States of America Patent

APP PUB NO 20240066341A1
SERIAL NO

18454948

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Abstract

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A PFAS detoxification system 1 includes a concentrator 11 configured to concentrate a waste liquid containing PFAS, discharged from a semiconductor manufacturing apparatus 100; a sulfuric acid processing tub 12 configured to decompose and evaporate a concentrated liquid concentrated by the concentrator 11 with a liquid containing concentrated sulfuric acid; and a cooling apparatus 13 configured to liquefy and collect a gas evaporated by the sulfuric acid processing tub 12.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Shinji Koshi City, JP 245 2196

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