Small-angle X-ray scatterometry

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United States of America Patent

PATENT NO 12085521
APP PUB NO 20240077435A1
SERIAL NO

18307823

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Abstract

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A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.

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Patent Owner(s)

Patent OwnerAddress
BRUKER TECHNOLOGIES LTDP O BOX 103 MIGDAL HAEMEK 23100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dikopoltsev, Alex Haifa, IL 17 205
Krokhmal, Alexander Haifa, IL 16 262
Vinshtein, Yuri Hadera, IL 7 26
Wormington, Matthew Highlands Ranch, US 29 342

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