APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
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United States of America Patent
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Issued Date -
Mar 28, 2024
app pub date -
Mar 13, 2023
filing date -
Sep 27, 2022
priority date (Note) -
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Abstract
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support a substrate; and a cleaning unit configured to clean a bottom surface of the substrate supported on the support unit, and wherein the cleaning unit comprises: a body; and a protrusion formed to be upwardly protruding from the body, and the protrusion is positioned to be spaced apart from the bottom surface.
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