VAPORIZER AND VAPORIZATION SUPPLY DEVICE
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United States of America Patent
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Issued Date -
Mar 28, 2024
app pub date -
Feb 1, 2022
filing date -
Mar 11, 2021
priority date (Note) -
Published
status (Latency Note)
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Abstract
A vaporizer 10 comprises: a vaporization chamber 12 for storing a liquid; a bottom heater 14B provided in the vaporization chamber 12 which includes a winding portion 141, acting as a heat source, to contact with the liquid stored in the vaporization chamber and an upright portion 142 erected from the winding portion and having an end portion with a heater terminal 143; and a relief valve 16 connected to the vaporization chamber 12. The vaporizer 10 is configured to be able to appropriately vaporize and supply ultrapure water.
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