SUBSTRATE PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
Apr 11, 2024
app pub date -
Oct 9, 2023
filing date -
Oct 11, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate processing apparatus includes: a loading/unloading part having a first side surface into or from which a container accommodating a substrate is loaded or unloaded and a second side surface opposite to the first side surface; a substrate transfer part extending in a first direction orthogonal to the second side surface; and a plurality of batch processors adjacent to each other in a length direction of the substrate transfer part. The loading/unloading part includes: a first transfer device and a second transfer device configured to transfer the container; a first area accessible to the first transfer device and having a plurality of first storage shelves configured to store the container, a second area accessible to the second transfer device and having a plurality of second storage shelves configured to store the container; and a movable shelf configured to be movable between the first area and the second area.
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