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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
TOKYO ELECTRON LIMITED	3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 107-6325

International Classification(s)

• C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
GOTO, Daisuke	Koshi City, JP	176	722
HASHIMOTO, Yusuke	Koshi City, JP	97	429
HIGASHIJIMA, Jiro	Koshi City, JP	44	213
MORI, Kanta	Koshi City, JP	9	66
OBARU, Tomoaki	Koshi City, JP	1	0
OGATA, Nobuhiro	Koshi City, JP	43	248

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Oct 18, 2027
7.5 Year Payment	$3600.00	$1800.00	$900.00	Oct 18, 2031
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Oct 18, 2035

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2024/0124,984

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE GRIPPING DEVICE

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