LINEAR EVAPORATION SOURCE
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United States of America Patent
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Issued Date -
Apr 25, 2024
app pub date -
Jun 22, 2023
filing date -
Jun 22, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a linear evaporation source which receives heat from a crucible such that heat is uniformly distributed while a uniform heat distribution cover is seated on an accommodation case. The provided linear evaporation source includes an accommodation case forming an accommodation space with an open upper side, a crucible accommodated in the accommodation space and configured to discharge a deposition material, and a uniform heat distribution cover configured to cover the accommodation case to uniformly distribute a temperature by receiving heat from the crucible.
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