DEPOSITION APPARATUS
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United States of America Patent
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Issued Date -
Apr 25, 2024
app pub date -
Aug 16, 2023
filing date -
Aug 16, 2023
priority date (Note) -
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status (Latency Note)
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Abstract
A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.
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