POLISHING APPARATUS
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United States of America Patent
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Issued Date -
May 2, 2024
app pub date -
Oct 26, 2023
filing date -
Oct 27, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A polishing apparatus includes a shank including a rotation shaft extending in a first direction, a first cushion unit covering a side surface of the shank and having a first hardness, a first film unit adjacent to the first cushion unit in a second direction crossing the first direction and covering a side surface of the first cushion unit, a second cushion unit disposed below the shank, having a second hardness different from the first hardness, and including a first part and a second part. The first part has a cylindrical shape and the second part is disposed below the first part and has a conical shape protruding in a direction opposite to the first part, and a second film unit covering the second part.
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