ELECTRO OPTICAL DEVICES FABRICATED USING DEEP ULTRAVIOLET RADIATION
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United States of America Patent
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May 2, 2024
app pub date -
Jan 4, 2024
filing date -
Feb 7, 2020
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Abstract
An optical device is described. At least a portion of the optical device includes ferroelectric non-linear optical material(s) and is fabricated utilizing ultraviolet lithography. In some aspects the at least the portion of the optical device is fabricated using deep ultraviolet lithography. In some aspects, the short range root mean square surface roughness of a sidewall of the at least the portion of the optical device is less than ten nanometers. In some aspects, the at least the portion of the optical device has a loss of not more than 2 dB/cm.
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