PASSIVE DISPERSION COMPENSATION FOR AN ACOUSTO-OPTIC DEFLECTOR

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United States of America Patent

APP PUB NO 20240152022A1
SERIAL NO

17981108

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Abstract

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An optical scanner may include one or more acousto-optic deflectors (AODs) configured to deflect an optical beam along one or more scanning directions, where a deflection angle of the optical beam from the one or more AODs is controllable by one or more drive signals applied to the one or more AODs. The scanner may further include a dispersion compensator, where dispersion by the dispersion compensator at least partly compensates for dispersion by the one or more AODs to provide that the deflection angle of the optical beam at a particular configuration of the one or more drive signals is constant within a first tolerance for wavelengths of the optical beam within a wavelength range, and where at least one of the dispersion of the dispersion compensator or a transmittance of the dispersion compensator is independent of a polarization of the optical beam within a second tolerance.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Peled, Itay Jerusalem, IL 31 150

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