SURFACE ACOUSTIC WAVE SENSOR DEVICE
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United States of America Patent
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Issued Date -
May 16, 2024
app pub date -
Mar 3, 2022
filing date -
Mar 3, 2022
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Abstract
An acoustic wave sensor device comprises a first interdigitated transducer, a first reflection structure, a second reflection structure, a first resonance cavity comprising a first upper surface and formed between the first interdigitated transducer and the first reflection structure, and a second resonance cavity comprising a second upper surface and formed between the first interdigitated transducer and the second reflection structure. At least one of the first and second upper surfaces is covered at least partly by a metalization layer or a passivation layer. The present invention relates also to an acoustic wave sensor assembly.
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