ACOUSTIC WAVE DEVICE, FILTER, AND MULTIPLEXER
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United States of America Patent
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Issued Date -
May 16, 2024
app pub date -
Nov 13, 2023
filing date -
Nov 13, 2023
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Abstract
An acoustic wave device includes a piezoelectric layer, and at least one pair of comb-shaped electrodes provided on the piezoelectric layer, each of the comb-shaped electrodes including electrode fingers each having a first layer and a second layer provided on the first layer, the first layer being a titanium nitride layer with a thickness greater than 50 nm, the second layer being a metal layer.
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