CUTTING APPARATUS
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
Nov 2, 2023
filing date -
Nov 17, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
An image capturing unit includes a camera, an assembled lens that is connected to the camera and that magnifies a region to be imaged, a cover lens that covers an objective lens of the assembled lens, a fluid spray nozzle that sprays a fluid including water to the cover lens, a fluid removing nozzle that blows air to the cover lens to remove the fluid deposited on the cover lens, and a cutting water removing nozzle that blows air to a wafer positioned at a position directly under the cover lens, to remove cutting water stagnating on an upper surface of the wafer.
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