ASSEMBLY FOR SEPARATING RADIATION IN THE FAR FIELD

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United States of America Patent

APP PUB NO 20240168392A1
SERIAL NO

18277188

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Abstract

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An assembly and method for separating first radiation and second radiation in the far field, wherein the first radiation and the second radiation have non-overlapping wavelengths, The assembly comprises a capillary structure, wherein the first radiation and the second radiation propagate coaxially along at least a portion of the capillary structure, and an optical structure configured to control the spatial distribution of the first radiation outside of the capillary structure, through interference, such that the intensity of the first radiation in the far field is reduced along an optical axis of the second radiation.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B V5500 AH VELDHOVEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
EDWARD, Stephen Eindhoven, NL 5 4
NIENHUYS, Han-Kwang Utrecht, NL 37 160
O'DWYER, David Eindhoven, NL 3 0
PORTER, Christina Lynn Veldhoven, NL 5 0
REIJNDERS, Marinus Petrus Eindhoven, NL 13 12
REININK, Johan Uden, NL 3 0
ROOBOL, Sander Bas Veldhoven, NL 25 138
SMORENBURG, Petrus Wilhelmus Veldhoven, NL 20 47

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