SUBSTRATE TRANSFERRING APPARATUS AND SUBSTRATE TRANSFERRING METHOD
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Oct 25, 2023
filing date -
Nov 30, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate transfer apparatus includes a traveling rail including a straight section and a curved section, a raceway structure disposed on the traveling rail and configured to fix the traveling rail, a traveling device including a traveling wheel configured to travel on the traveling rail so as to transfer a substrate, a first sensor connected to the raceway structure and configured to recognize the traveling device, at least one second sensor connected to the raceway structure and configured to recognize the traveling device, and a third sensor connected to the traveling rail and configured to recognize the traveling device, wherein the at least one second sensor and the third sensor are configured to move in a traveling direction of the traveling device.
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