MICROELECTRONIC THERMAL VALVE
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Dec 20, 2023
filing date -
Dec 6, 2015
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Abstract
A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.
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