METHOD FOR MANUFACTURING ELECTROFORMING MOLD AND PHOTOMASK
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Mar 23, 2022
filing date -
Mar 29, 2021
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Abstract
A method for manufacturing an electroforming mold, the method including: forming a pattern including a soluble portion and an insoluble portion in a photoresist layer stacked on a substrate; removing the soluble portion to form a cavity; and when a corner portion is formed in the soluble portion, forming a soluble portion corner correction portion that is configured to suppress a decrease in sharpness of the corner portion of the soluble portion in a region facing the corner portion of the soluble portion across a vertex of the corner portion of the soluble portion.
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