INTERLOCK APPARATUS FOR CHEMICAL SUPPLY SYSTEM

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United States of America Patent

APP PUB NO 20240178018A1
SERIAL NO

18433457

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure provides a chemical supply system, including a chamber, a tubing extending into the chamber, an interlock apparatus, including a fixture for fastening the tubing, and means for determining whether the tubing is fastened by the fixture.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MFG CO LTDNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, YI CHUAN HSINCHU CITY, TW 6 8
CHIANG, FANG-PIN TAICHUNG CITY, TW 7 0
HUANG, CHAOYEN HSINCHU CITY, TW 2 0
TSAI, TSUNG-LIN TAINAN CITY, TW 21 89

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