VACUUM COATING DEVICE
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United States of America Patent
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Issued Date -
Jun 6, 2024
app pub date -
Feb 9, 2024
filing date -
Jun 23, 2022
priority date (Note) -
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Abstract
Disclosed is a vacuum coating device, including a heating apparatus, a loading plate apparatus, a spraying apparatus, a processing chamber and a plurality of valve chambers. The heating apparatus is configured to heat the processing chamber to a temperature that reaches a reaction temperature of the object to be coated and the processing gas, the loading plate apparatus is configured to load the object to be coated, the processing chamber includes a first coating vacuum chamber, a second coating vacuum chamber and a loading plate conversion vacuum chamber, and the loading plate conversion vacuum chamber is configured to convert a coating surface of an object to be coated to achieve a function of coating both sides of the object to be coated on a closed production line, and to improve production quality of the object to be coated.
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