A PROCESS FOR ELECTROCHEMICAL DEPOSITION OF COPPER WITH DIFFERENT CURRENT DENSITIES

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United States of America Patent

APP PUB NO 20240183052A1
SERIAL NO

18552244

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Abstract

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A process for electrochemical deposition of copper, including:

    providing a rolled and annealed copper foil comprising a first surface and a second surface,etching the first surface of the rolled and annealed copper foil, thereby creating a first etched surface,depositing copper by electroless copper deposition on the first etched surface, thereby creating a first electroless copper layer on the first etched surface,depositing further copper by electrochemical deposition on the first electroless copper layer, thereby creating a first electrochemical copper layer, wherein in the electrochemical deposition in a first period of time a first current density is applied and in a second period of time a second current density is applied, wherein the second current density is lower than the first current density, and a layered product obtainable by the process.

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Patent Owner(s)

Patent OwnerAddress
ATOTECH DEUTSCHLAND GMBH & CO KG10553 BERLIN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BERNHARD, Tobias Berlin, DE 7 11
HAACK, Peter Berlin, DE 3 0
LEE, Jaewon Berlin, DE 119 611
PELDZINSKI-RANISCH, Vera Berlin, DE 1 0
SHIN, Hee-Bum Berlin, DE 7 16
VAZHENIN, Grigory Berlin, DE 5 3

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