DUAL-SEALED ACCELEROMETER WITH CAVITY PRESSURE MONITORING
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United States of America Patent
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Issued Date -
Jun 6, 2024
app pub date -
Oct 26, 2023
filing date -
Dec 5, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A MEMS accelerometer package includes multiple cavities such that a change in pressure corresponding to a breach in one or more of the cavities is readily identified based on the output of a pressure-sensitive sensor such as a MEMS resonator. One or more mitigations may be initiated in response to the identification of the change in pressure.
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