APPARATUS AND METHOD FOR MEASURING FLOW CONDUCTANCE OF SHOWERHEAD ASSEMBLY
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United States of America Patent
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Issued Date -
Jun 20, 2024
app pub date -
Dec 14, 2023
filing date -
Dec 14, 2023
priority date (Note) -
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Abstract
Methods and apparatuses for measuring a flow conductance of a showerhead assembly are described. For example, a showerhead assembly may be seated in a housing. A gas source may be coupled to an intake port of the showerhead assembly and supply gas to the showerhead assembly via the intake port. A pressure controller may be coupled between the gas source and the showerhead assembly. The pressure controller may measure a flow throughput of the gas that passes through the pressure controller. The pressure controller may maintain the gas being supplied to the showerhead assembly at a first pressure value. A pressure transducer coupled to an exhaust port of the showerhead assembly may measure a second pressure value. A controller may determine a flow conductance of the showerhead assembly based on the flow throughput and the first and second pressure values.
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