Importance

Loading Importance Indicators...

Abstract

A system includes a controller, a substrate transfer device including one or more moveable members, and a vibration sensor assembly coupled to a member of the one or more moveable members. The vibration sensor assembly includes an accelerometer configured to detect vibration of the substrate transfer device and a processing device coupled to the accelerometer. The processing device is to receive vibration data from the accelerometer. The processing device is further to determine a vibration frequency peak of the vibration data. The vibration frequency peak corresponds to a critical frequency associated with the substrate transfer device. The processing device is further to determine that the vibration frequency peak exceeds a threshold magnitude, responsive to which the processing device is further to cause a data signal indicative of the vibration frequency peak to be transmitted to the controller.

Loading the Abstract Image...

First Claim