FLUID CONTROL DEVICE, FLUID CONTROL SYSTEM, STORAGE MEDIUM STORING A PROGRAM FOR FLUID CONTROL DEVICE, AND FLUID CONTROL METHOD
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United States of America Patent
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Issued Date -
Jun 27, 2024
app pub date -
Mar 5, 2024
filing date -
Jun 25, 2021
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Abstract
In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.
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