APPARATUS FOR SUPPLYING TREATING MATERIAL AND SYSTEM FOR SUPPLYING THE TREATING MATERIAL
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United States of America Patent
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Issued Date -
Jul 11, 2024
app pub date -
Nov 5, 2023
filing date -
Jan 9, 2023
priority date (Note) -
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Abstract
An apparatus for supplying a treating material includes a nozzle discharging the treating material onto a substrate. A flow pipe channels the treating material to the nozzle. A cut-off valve connected to the flow pipe controls the discharge the treating material. A first controller controls a first opening and closing of the cut-off valve. A second controller controls a second opening and closing of the cut-off valve. The second opening and closing of the cut-off valve is performed by the second controller after a delay time has elapsed after the first opening and closing is completed.
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