Importance

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Abstract

The present disclosure relates to the technical field of plasma cleaning, and provides a plasma cleaning head for an optical member and a plasma cleaning device, including a plasma circulation assembly having a hollow shape and a lens frame mounted on the plasma circulation assembly, wherein the plasma circulation assembly is provided with an outlet port which is larger than an ejection port adapted to eject a plasma and is adapted to diffuse the plasma, and the lens frame is in communication with and surrounds the outlet port, and the lens frame is adapted to embed an optical lens body so that the optical lens body is arranged opposite to the outlet port to help improve dispersion and stability of the plasma flowing from the outlet port to the optical lens body, and helps to promote the energy absorption of the plasma by the optical lens body.

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First Claim