POLYMER NANOPARTICLE AND METHOD OF PREPARING SAME
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United States of America Patent
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Issued Date -
Jul 25, 2024
app pub date -
Jan 10, 2024
filing date -
Jan 13, 2023
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Abstract
Provided are a polymer nanoparticle, a method of preparing the polymer nanoparticle, and a polishing slurry including the polymer nanoparticle are provided, where the polymer nanoparticle including a mixture of a hydrophobic polymer and a copolymer including both hydrophobic and hydrophilic groups, the hydrophilic group of the copolymer is disposed on an outer surface of the polymer nanoparticle.
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