APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE SAME
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United States of America Patent
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Issued Date -
Jul 25, 2024
app pub date -
Jan 15, 2024
filing date -
Jan 19, 2023
priority date (Note) -
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Abstract
Disclosed is an apparatus for fabricating a blank mask, the apparatus including: a chamber; and a rotatable chuck placed inside the chamber, wherein the rotatable chuck includes: a support part configured to support an optical substrate placed on the support part; a guide part disposed on a side of the optical substrate and connected to the support part; and an air pump for spraying compressed air to a space between a side surface of the optical substrate and the guide part.
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