POLYURETHANES, POLISHING ARTICLES AND POLISHING SYSTEMS THEREFROM AND METHOD OF USE THEREOF
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United States of America Patent
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Issued Date -
Aug 1, 2024
app pub date -
May 27, 2022
filing date -
May 28, 2021
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Abstract
The present disclosure relates to polyurethanes comprising a reaction product of a reactive mixture including a polyol having a number average molecular weight of at least 400 Daltons, a diol chain extender having a molecular weight less than 400 Daltons, a diisocyanate; and a multifunctional amine. The present disclosure further provides polishing layers and polishing pads fabricated therefrom. Additionally, the present disclosure provides polishing systems and polishing methods employing said polishing layers and polishing pads.
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