Importance

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Abstract

A drive element is a drive element for rotating a movable part about a rotation axis, the drive element including: a fixation part rotatably supporting the movable part; and a drive part configured to rotate the movable part, wherein the drive part includes a piezoelectric layer, an upper electrode and a lower electrode placed with the piezoelectric layer interposed therebetween, and an insulating layer covering the piezoelectric layer, the upper electrode, and the lower electrode, and a wiring part composed of a single conductive layer connected to the upper electrode via a contact hole formed in the insulating layer is installed up to the fixation part.

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First Claim