POLISHING PAD, PYROLYSIS OIL OBTAINED THEREFROM, AND PROCESS FOR PREPARING THE SAME
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United States of America Patent
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Issued Date -
Aug 8, 2024
app pub date -
Jan 16, 2024
filing date -
Feb 6, 2023
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Abstract
The embodiment relates to a polishing pad that comprises a polishing layer. When pyrolysis oil obtained from the polishing pad is analyzed according to the KS M 2457 standard, the content of chlorine components is 13,000 mg/kg or more. The pyrolysis oil can be used as a high-quality heat source through a refining process. Accordingly, the embodiment can contribute to improving environmental problems while increasing the recycling rate of polishing pads.
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