Physical Quantity Sensor, Physical Quantity Sensor Device, And Inertial Measurement Unit
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United States of America Patent
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Issued Date -
Aug 15, 2024
app pub date -
Apr 23, 2024
filing date -
Oct 28, 2020
priority date (Note) -
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Abstract
A physical quantity sensor includes a substrate that has a first fixed electrode and a movable body that has a first mass portion facing the first fixed electrode. The first mass portion includes a first region, and a second region farther from the rotation axis than the first region, a first through-hole group is provided in the first region, and a second through-hole group is provided in the second region, and the movable body has a first surface on a substrate side, and a second surface. The first surface of the first mass portion is provided with a step or a slope such that a first gap distance of a first gap between the first mass portion and the first fixed electrode in the first region is smaller than a second gap distance of a second gap between the first mass portion and the first fixed electrode in the second region. A depth of through-holes of the first through-hole group and the second through-hole group is smaller than a maximum thickness of the movable body.
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