PELLICLE FOR FLAT PANEL DISPLAY PHOTOMASK
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United States of America Patent
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Issued Date -
Aug 22, 2024
app pub date -
Apr 29, 2024
filing date -
Sep 12, 2018
priority date (Note) -
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Abstract
A pellicle assembly for large-size photomasks including a frame member configured to be affixed to a large-size photomask substrate, a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport, and a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage.
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