Importance

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Abstract

A cleaning system and method can include a cleaning device including a soaking tank configured to accommodate cleaner; and a filtering device configured to filter a first substance being a mixture of the cleaner and mask residue in the soaking tank. The filtering device includes a sucking apparatus including an sucking port for sucking the first substance; a spraying apparatus, including a spraying port oriented a region that the sucking port is capable of sucking in a bottom of the soaking tank, the spraying port being configured to spray liquid or gas to flush the bottom of the soaking tank; and a filtering apparatus connected to the sucking apparatus to receive and filter the first substance sucked by the sucking port.

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First Claim